DocumentCode
1905345
Title
Compound Semiconductor Devices for Operation at Elevated Temperatures
Author
Hartnagel, H.L.
Author_Institution
Institut fÿr Hochfrequenztechnik, Technische Hochschule, Darmstadt, Merckstr. 25, 6100 Darmstadt, Germany
fYear
1992
fDate
14-17 Sept. 1992
Firstpage
115
Lastpage
121
Keywords
Electromagnetic heating; Engines; Gallium arsenide; Heat sinks; Plasma applications; Plasma immersion ion implantation; Plasma temperature; Semiconductor devices; Semiconductor materials; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location
Leuven, Belgium
Print_ISBN
0444894780
Type
conf
Filename
5435202
Link To Document