DocumentCode
1906984
Title
Self-aligned fabrication of gated organic nano-pillar cold cathode
Author
Baba, A. ; Yoshida, T. ; Asano, T.
Author_Institution
Center for Microelectron. Syst., Kyushu Inst. of Technol., Iizuka, Japan
fYear
2003
fDate
7-11 July 2003
Firstpage
17
Lastpage
18
Abstract
We successfully fabricated a gated nano-pillar cold cathode using the self-aligned fabrication technique and field electron emission from the cold cathode was demonstrated. It was found that the turn-on voltage of the emitter was 30 V and emission current of the order of 10/sup -7/ A was obtained at the gate voltage of 50 V. This new type of micro cold cathode will be useful for display devices.
Keywords
cathodes; electron field emission; field emitter arrays; nanostructured materials; nanotechnology; organic compounds; photoresists; spin coating; SiO/sub 2/; emission current; field electron emission; gated organic nanopillar cold cathode; self-aligned fabrication; turn-on voltage; Anodes; Apertures; Cathodes; Electrodes; Electron emission; Etching; Fabrication; Leakage current; Resists; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1222961
Filename
1222961
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