DocumentCode
1908033
Title
Benchmarking Semiconductor Manufacturing
Author
Leachman, Robert C. ; Hodges, David A.
Author_Institution
University of California
fYear
1997
fDate
22-24 September 1997
Firstpage
2
Lastpage
9
Keywords
Calendars; Companies; Computer integrated manufacturing; Fabrication; Manufacturing processes; Microelectronics; Productivity; Semiconductor device manufacture; Throughput; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194372
Filename
1503302
Link To Document