DocumentCode
1908842
Title
Manufacture the field emission emitters using GEM
Author
Mao-Ying Teng ; Mao-Hua Teng ; Kuo-Shung Liu ; I-Nan Lin
Author_Institution
Dept. of Mater. Sci. & Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2003
fDate
7-11 July 2003
Firstpage
151
Lastpage
152
Abstract
In this paper, a novel process is adopted to form nanotube-like carbon fibrous structure which show good field emission behavior. The morphology of nanotube-like structure were examined by SEM. The electron field emission properties were measured using a parallel setup, using 150/spl mu/m cover glass as spacer. The current-voltage (I-V) characteristics were measured by Keithley 237 electrometers.
Keywords
carbon fibres; carbon nanotubes; electric current measurement; field emission displays; scanning electron microscopy; surface morphology; voltage measurement; 150 micron; C; Keithley 237 electrometry; SEM; carbon fibrous structure; current-voltage characteristics; electron field emission emitters; graphite encapsulated metal; surface morphology; Annealing; Atmospheric measurements; Carbon dioxide; Carbon nanotubes; Cobalt; Electron emission; Manufacturing; Morphology; Nanostructures; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223028
Filename
1223028
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