DocumentCode
1909283
Title
Polyimide Optical Waveguide with Multi-Fan-Out for Multichip Module Application
Author
Matsumoto, Takuji ; Fukuoka, Takeshi ; Kurino, Hiroyuki ; Koyanagi, Mitsmuasa
Author_Institution
Tohoku University, Japan
fYear
1997
fDate
22-24 September 1997
Firstpage
276
Lastpage
279
Keywords
Aluminum; Bonding; Copper; Large scale integration; Micromirrors; Multichip modules; Optical films; Optical interconnections; Optical waveguides; Polyimides;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194419
Filename
1503349
Link To Document