• DocumentCode
    1909951
  • Title

    Optical testing of submicron-technology MOSFETs and bipolar transistors

  • Author

    Pogany, Dionyz ; Furbock, C. ; Seliger, N. ; Habas, P. ; Gornik, E.

  • Author_Institution
    TU Vienna, Austria
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    372
  • Lastpage
    375
  • Keywords
    Bipolar transistors; Free electron lasers; Laser beams; MOSFETs; Optical interferometry; Optical modulation; Optical refraction; Optical variables control; Plasma temperature; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194443
  • Filename
    1503373
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1909951