DocumentCode
1910510
Title
Field emission characteristics of defect-controlled polyimide tunneling cathode
Author
Baba, A. ; Yoshida, T. ; Asano, T.
Author_Institution
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
fYear
2003
fDate
7-11 July 2003
Firstpage
267
Lastpage
268
Abstract
In this paper, we investigate the feasibility of an ion-beam irradiated polyimide film for application to MIM cold cathode´s insulating material. We call this cold cathode defect-controlled tunneling cathode.
Keywords
MIM devices; cathodes; electron field emission; insulating materials; polymer films; tunnelling; MIM cold cathode´s insulating material; defect-controlled polyimide tunneling cathode; field emission; ion-beam irradiated polyimide film; Cathodes; Conducting materials; Electron emission; Fabrication; Insulation; Polyimides; Silicides; Threshold voltage; Tungsten; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223086
Filename
1223086
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