Porous silicon as multifunctional material in MEMS

Author

Mescheder, U.M. ; Kovacs, A. ; Kronast, W. ; Barsony, I. ; Adam, M. ; Ducso, Cs.

Author_Institution

Univ. of Appl. Sci., Furtwangen, Germany

fYear

2001

fDate

2001

Firstpage

483

Lastpage

488

Abstract

Porous Si with pore size in the range of a few nanometers can be used as multifunctional material in different MEMS applications. In this paper, we first discuss the fabrication and characterization of porous Si. Porous Si has been used as sacrificial layer for the realization of micro-heaters, micro-hotplates and microphones. A new type of surface micromachining process for the fabrication of sub-μm freestanding crystalline structures is presented. The use of porous Si as functional layer for different types of microsystems is discussed

Keywords

anodisation; elemental semiconductors; heating elements; membranes; micromachining; micromechanical devices; micromechanical resonators; microphones; microsensors; porous semiconductors; silicon; MEMS; MEMS applications; Si; Si pore size; anodisation process; freestanding crystalline structures; micro-heaters; micro-hotplates; microphones; microsystems; multifunctional material; porous Si; porous Si characterization; porous Si fabrication; porous Si functional layer; porous Si sacrificial layer; porous silicon; surface micromachining process; Conducting materials; Crystalline materials; Crystallization; Current density; Fabrication; Material properties; Micromechanical devices; Nanobioscience; Optical filters; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966471

Filename

966471