A novel Love mode device with nanocrystalline ZnO film for gas sensing applications

Author

Kalantar-zadeh, Kourosh ; Trinchi, Adrian ; Wlodarski, Wojtek ; Holland, Anthony ; Atashbar, Massood Z.

Author_Institution

Sch. of Electr. & Comput. Eng, RMIT Univ., Melbourne, Vic., Australia

fYear

2001

fDate

2001

Firstpage

556

Lastpage

561

Abstract

A novel surface acoustic wave (SAW) gas sensor is presented. The sensor is based on a ZnO (2.8 μm)/90° rotated ST-cut quartz crystal structure. Such a structure allows the propagation of Love mode SAWs. The ZnO layer performs as both the acoustic wave guiding media and the gas sensitive film. The response of the sensor was investigated for different concentrations of O₂ and 100ppm C₃H₈ in N₂ gas. The sensor is highly stable due to the large electromechanical coupling coefficient of the device, and is able to detect oxygen concentrations as low as 1 ppm in nitrogen gas

Keywords

Love waves; gas sensors; piezoelectric transducers; surface acoustic wave sensors; zinc compounds; 2.8 micron; Love mode device; N₂; O₂; SAW sensor; ZnO; acoustic wave guiding media; electromechanical coupling coefficient; gas sensing applications; gas sensitive film; propane; rotated ST-cut quartz crystal structure; Acoustic propagation; Acoustic sensors; Acoustic waves; Electromechanical sensors; Gas detectors; Nanoscale devices; Nitrogen; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966484

Filename

966484