A CIM system with advance control functions for next generation semiconductor devices

Author

Matsumoto, Shigeru ; Ishizuka, Hiroaki ; Nakata, Kazuki ; Tanimura, Shoichi ; Kuroda, Keiji

Author_Institution

ULSI Process Technol. Dev. Center, Matsushita Electron. Corp., Kyoto, Japan

fYear

1997

fDate

6-8 Oct 1997

Abstract

In this paper, a framework for `advance control´ to prevent various troubles on lot processing in ULSI development and fabrication lines is described. The features of the framework are preventing in advance troubles caused by the deterioration of equipment performance by a computer system and bringing abilities of experts on semiconductor technology into full operation. We have developed a Computer Integrated Manufacturing (CIM) system with advanced control functions to realize this framework. The multimedia information system is one of the new methods which can transfer the abnormal information to experts at any location and any situation, immediately

Keywords

ULSI; computer integrated manufacturing; diagnostic expert systems; integrated circuit yield; multimedia systems; scheduling; ULSI development; abnormal information; advance control functions; computer integrated manufacturing system; data prediction system; deterioration of equipment performance; expert system; fabrication lines; lot processing; lot scheduling system; multimedia information system; next generation semiconductor devices; reasoning; weighted assigned function method; yield; Computer integrated manufacturing; Control systems; Design engineering; Fabrication; Hardware; Multimedia systems; Plasma density; Plasma temperature; Semiconductor devices; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-3752-2

Type

conf

DOI

10.1109/ISSM.1997.664626

Filename

664626