DocumentCode

1912870

Title

Salicides for 0.18 um and below

Author

Maex, K.

Author_Institution

IMEC, Leuven, Belgium

fYear

1998

fDate

8-10 Sept. 1998

Firstpage

69

Lastpage

69

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1998. Proceeding of the 28th European

Conference_Location

Bordeaux, France

Print_ISBN

2-86332-234-6

Type

conf

Filename

1503491