GaAs monolithic integrated microwave power sensor in coplanar waveguide technology

Author

Dehe, A. ; Klingbeil, H. ; Krozer, V. ; Fricke, K. ; Beilenhoff, K. ; Hartnagel, H.L.

Author_Institution

Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany

fYear

1996

fDate

17-19 June 1996

Firstpage

179

Lastpage

182

Abstract

We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity, this sensor is capable of detecting RF power with a sensitivity of 1.1 V/W without any waveguide coupling structure.

Keywords

III-V semiconductors; MMIC; coplanar waveguides; electric sensing devices; gallium arsenide; integrated circuit technology; membranes; micromachining; microsensors; microwave measurement; power measurement; thermoelectric devices; AlGaAs; AlGaAs thermoelectric sensor; CPW technology; GaAs; GaAs bulk micromachined membrane; MMIC compatible broadband sensor; RF power detection; coplanar waveguide technology; fabrication technology; microwave power sensor; monolithic integrated sensor; sensitivity; Biomembranes; Conductors; Coplanar waveguides; Electromagnetic heating; Gallium arsenide; MMICs; Microwave sensors; Microwave technology; Temperature measurement; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Millimeter-Wave Monolithic Circuits Symposium, 1996. Digest of Papers., IEEE 1996

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-3360-8

Type

conf

DOI

10.1109/MCS.1996.506331

Filename

506331