DocumentCode

1917687

Title

Incorporation of Equipment Simulation into Integrated Feature Scale Profile Evolution

Author

Pyka, W. ; Selberherr, S. ; Sukharev, V.

Author_Institution

Vienna University of Technology, Austria

fYear

2000

fDate

11-13 September 2000

Firstpage

180

Lastpage

183

Keywords

Adhesives; Atherosclerosis; Conductivity; Distribution functions; Inductors; Large scale integration; Logic; Microelectronics; Protection; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2000. Proceeding of the 30th European

Print_ISBN

2-86332-248-6

Type

conf

DOI

10.1109/ESSDERC.2000.194744

Filename

1503674