P2–10: Densely populated small CNT clusters for electron field emission

In this paper, we will present a cathode film with a configuration of spaced and densely populated small CNT clusters. Depending on the particular process to be described here and the desired application, randomly located clusters ranging from 1-2 μm in size with densities > 10⁶/cm² to single or a few CNTs with densities > 10⁷/cm² can be fabricated. Combined with optimal growth conditions, these films emit electrons readily at low threshold field, and are stable, uniform and robust. The fabrication process is compatible with microfabrication processes as well as vacuum tube processing, and can be scaled to large areas. Integrated gate aperture can be fabricated using a self aligned approach around each of these random and densely populated small clusters and a focus grid can be further added onto the wafer for electron beam control.