• DocumentCode
    1920327
  • Title

    P1–16: Low operation voltage nanometer base length, sharp and uniform transfer mold field emitter arrays

  • Author

    Nakamoto, Masayuki ; Moon, Jonghyun ; Shiratori, Koji ; Kuroki, Wataru

  • Author_Institution
    Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
  • fYear
    2010
  • fDate
    26-30 July 2010
  • Firstpage
    60
  • Lastpage
    61
  • Abstract
    Low operation voltage nanometer-order base length, extremely sharp and uniform field emitter arrays with 190 nm base length, 3.5 nm tip radius and 8 V/μm turn-on field at the short distance of less than 10 μm between anode and emitter, which is one of the lowest turn-on fields FEAs ever reported and is almost similar to the theoretical limit of 4.5 eV for the molybdenum work function value, have been developed by Transfer Mold method to realize the uniform field emission characteristics.
  • Keywords
    finite element analysis; low-power electronics; nanoelectronics; FEA; low operation voltage; nanometer base length; sharp and uniform transfer mold field emitter arrays; transfer mold method; uniform field emission characteristics; uniform field emitter arrays; Anodes; Field emitter arrays; Moon; Nanoscale devices; Shape; Silicon; Substrates; Transfer Mold field emitter arrays; low operation voltage; nanometer base length;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
  • Conference_Location
    Palo Alto, CA
  • Print_ISBN
    978-1-4244-7889-7
  • Electronic_ISBN
    978-1-4244-7888-0
  • Type

    conf

  • DOI
    10.1109/IVNC.2010.5563183
  • Filename
    5563183