DocumentCode
1920327
Title
P1–16: Low operation voltage nanometer base length, sharp and uniform transfer mold field emitter arrays
Author
Nakamoto, Masayuki ; Moon, Jonghyun ; Shiratori, Koji ; Kuroki, Wataru
Author_Institution
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
fYear
2010
fDate
26-30 July 2010
Firstpage
60
Lastpage
61
Abstract
Low operation voltage nanometer-order base length, extremely sharp and uniform field emitter arrays with 190 nm base length, 3.5 nm tip radius and 8 V/μm turn-on field at the short distance of less than 10 μm between anode and emitter, which is one of the lowest turn-on fields FEAs ever reported and is almost similar to the theoretical limit of 4.5 eV for the molybdenum work function value, have been developed by Transfer Mold method to realize the uniform field emission characteristics.
Keywords
finite element analysis; low-power electronics; nanoelectronics; FEA; low operation voltage; nanometer base length; sharp and uniform transfer mold field emitter arrays; transfer mold method; uniform field emission characteristics; uniform field emitter arrays; Anodes; Field emitter arrays; Moon; Nanoscale devices; Shape; Silicon; Substrates; Transfer Mold field emitter arrays; low operation voltage; nanometer base length;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2010 23rd International
Conference_Location
Palo Alto, CA
Print_ISBN
978-1-4244-7889-7
Electronic_ISBN
978-1-4244-7888-0
Type
conf
DOI
10.1109/IVNC.2010.5563183
Filename
5563183
Link To Document