DocumentCode
1920428
Title
Tribological characteristics of SiNx film
Author
Wen, Jianming ; Ying, Xiao ; Wong, King ; Barth, Gunter ; Chen, GaLane
Author_Institution
Quinta Corp.
fYear
1999
fDate
18-21 May 1999
Keywords
Dielectric substrates; Magnetic heads; Magnetooptic effects; Memory; Optical films; Optical microscopy; Plastics; Silicon compounds; Sputtering; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-5555-5
Type
conf
DOI
10.1109/INTMAG.1999.837115
Filename
837115
Link To Document