Elevated Co-Silicide for sub-100nm High Performance and RF CMOS

Author

Jurczak, M. ; de Potter, M. ; Rooyackers, R. ; Jeamsaksiri, W. ; Redolfi, A. ; Grau, L. ; Lauwers, A. ; Lindsay, R. ; Peytier, I. ; Augendre, E. ; Badenes, G.

Author_Institution

IMEC, Leuven, Belgium

fYear

2002

fDate

24-26 September 2002

Firstpage

311

Lastpage

314

Keywords

Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2002. Proceeding of the 32nd European

Print_ISBN

88-900847-8-2

Type

DOI

10.1109/ESSDERC.2002.194931

Filename

1503861

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