• DocumentCode
    1922869
  • Title

    Preparation method of Co-/spl gamma/ Fe/sub 2/O/sub 3//NiO thin film media using ECR plasma oxidization

  • Author

    Yamamot, S. ; Santoki, T. ; Kurisu, H. ; Matsuura, M. ; Koujima, J. ; Nakata, K. ; Kakihara, Y. ; Do, Thanh ; Tamari, K.T.

  • Author_Institution
    Yamaguchi University
  • fYear
    1999
  • fDate
    18-21 May 1999
  • Keywords
    Coercive force; Helium; Ionization; Iron; Plasma density; Plasma measurements; Plasma properties; Plasma temperature; Sputtering; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-5555-5
  • Type

    conf

  • DOI
    10.1109/INTMAG.1999.837242
  • Filename
    837242