DocumentCode
1922869
Title
Preparation method of Co-/spl gamma/ Fe/sub 2/O/sub 3//NiO thin film media using ECR plasma oxidization
Author
Yamamot, S. ; Santoki, T. ; Kurisu, H. ; Matsuura, M. ; Koujima, J. ; Nakata, K. ; Kakihara, Y. ; Do, Thanh ; Tamari, K.T.
Author_Institution
Yamaguchi University
fYear
1999
fDate
18-21 May 1999
Keywords
Coercive force; Helium; Ionization; Iron; Plasma density; Plasma measurements; Plasma properties; Plasma temperature; Sputtering; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-5555-5
Type
conf
DOI
10.1109/INTMAG.1999.837242
Filename
837242
Link To Document