DocumentCode
1930860
Title
Laser induced plasma detection by flat and circular interdigital electrodes in laser material processing
Author
Yuan-Jen Chang ; Chun-Ting Chen ; Chao-Ching Ho ; Jin-Chen Hsu ; Chia-Lung Kuo
Author_Institution
Nat. Yunlin Univ. of Sci. & Technol., Yunlin, Taiwan
fYear
2013
fDate
12-16 May 2013
Firstpage
1
Lastpage
1
Abstract
In this paper, we propose two new interdigital electrode designs, flat and circular, to increase the signal level and the detection sensitivity of laser-induced plasma.
Keywords
electrodes; laser materials processing; plasma diagnostics; plasma production by laser; circular interdigital electrodes; detection sensitivity; flat interdigital electrodes; laser induced plasma detection; laser material processing; signal level; Electric fields; Electrodes; Laser ablation; Laser theory; Monitoring; Plasmas;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe (CLEO EUROPE/IQEC), 2013 Conference on and International Quantum Electronics Conference
Conference_Location
Munich
Print_ISBN
978-1-4799-0593-5
Type
conf
DOI
10.1109/CLEOE-IQEC.2013.6801577
Filename
6801577
Link To Document