DocumentCode
1932956
Title
MgO erosion in plasma displays measured with microbeam RBS
Author
McGrath, R.T. ; Veerasingam, R. ; Schone, H. ; Walsh, Declan
Author_Institution
Pennsylvania State Univ., University Park, PA, USA
fYear
1997
fDate
19-22 May 1997
Firstpage
315
Lastpage
316
Abstract
Summary form only given. Spatially resolved Rutherford backscattering (RBS) measurements have been made on interior thin film surfaces of plasma driven flat panel displays. Panels, provided by Photonics Imaging, were manufactured with films of MgO, typically 100 nm thick, on interior surfaces adjacent to the discharge working gas. MgO has good secondary electron emission properties and its presence enhances the pixel discharge intensity per volt applied. In these experiments, pixels were operated at excessively high voltages for long periods of time in order to accelerate the pixel aging processes. The nuclear microprobe at Sandia National Labs was then used to measure the erosion of the MgO that had occurred.
Keywords
Rutherford backscattering; flat panel displays; gas-discharge displays; magnesium compounds; secondary electron emission; MgO; MgO erosion; MgO films; discharge working gas; interior thin film surfaces; microbeam Rutherford backscattering; nuclear microprobe; pixel discharge intensity; plasma displays; plasma driven flat panel displays; secondary electron emission properties; spatially resolved Rutherford backscattering; Backscatter; Flat panel displays; Photonics; Plasma displays; Plasma materials processing; Plasma measurements; Plasma properties; Spatial resolution; Surface discharges; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.605154
Filename
605154
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