• DocumentCode
    1935234
  • Title

    Microfabricated toroidal planar inductors with different magneuc core schemes for mems and power electronic applications

  • Author

    Liakopoulos, T.M. ; Ahn, Chong H.

  • Author_Institution
    Centerfor Microelectronic Sensors and MEMS
  • fYear
    1999
  • fDate
    18-21 May 1999
  • Keywords
    Coils; Conductors; Fabrication; Frequency; Inductance measurement; Inductors; Magnetic cores; Magnetic flux; Micromechanical devices; Spirals;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-5555-5
  • Type

    conf

  • DOI
    10.1109/INTMAG.1999.837889
  • Filename
    837889