DocumentCode
1935234
Title
Microfabricated toroidal planar inductors with different magneuc core schemes for mems and power electronic applications
Author
Liakopoulos, T.M. ; Ahn, Chong H.
Author_Institution
Centerfor Microelectronic Sensors and MEMS
fYear
1999
fDate
18-21 May 1999
Keywords
Coils; Conductors; Fabrication; Frequency; Inductance measurement; Inductors; Magnetic cores; Magnetic flux; Micromechanical devices; Spirals;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 1999. Digest of INTERMAG 99. 1999 IEEE International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-5555-5
Type
conf
DOI
10.1109/INTMAG.1999.837889
Filename
837889
Link To Document