Simulation and design of a resonant polysilicon microbridge

Author

Vasile, Gabriel ; Lepadatu, Cristian ; Moldovan, Carmen ; Nedelcu, Oana

Author_Institution

Dept. of Eng. Sci., Politehnica Univ., Bucharest, Romania

Volume

2

fYear

2001

fDate

37165

Firstpage

573

Abstract

Chemical or mechanical microsensors based on resonant microstructures can be produced in microsystems silicon technology. Detection is related to a shift of the resonant frequency of a microbridge by means of a laser beam. The use of conductive polysilicon is appropriate for fabrication of the structure. This paper develops a reliable electromechanical model for design of the device and its technological process. By MemCAD and MathCAD software the dynamic behaviour is numerically simulated. Random deviations for physical and technological parameters were also simulated by the Monte Carlo method

Keywords

Monte Carlo methods; chemical sensors; elemental semiconductors; micromechanical resonators; microsensors; semiconductor device models; silicon; MathCAD software; MemCAD software; Monte Carlo method; Si; chemical microsensors; conductive polysilicon; design; dynamic behaviour; electromechanical model; laser beam; mechanical microsensors; microbridge resonant frequency shift; numerical simulation; random deviations; resonant microstructures; resonant polysilicon microbridge; simulation; Chemical lasers; Chemical technology; Laser beams; Laser modes; Laser theory; Microsensors; Microstructure; Resonance; Resonant frequency; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 2001. CAS 2001 Proceedings. International

Conference_Location

Sinaia

Print_ISBN

0-7803-6666-2

Type

conf

DOI

10.1109/SMICND.2001.967532

Filename

967532