A low frequency MEMS vibration sensor for low power missile health monitoring

This paper addresses the design, fabrication and characterization of a first-generation, low frequency MEMS vibration sensor. The sensor is designed specifically for applications requiring extremely low power vibration detection at only targeted frequencies. For development, lumped element and finite element modeling was performed, driving the design towards a realizable geometry that addresses the targeted performance specs. The sensors were microfabricated using conventional surface micromachining, sol-gel PZT (lead zirconate titanate) thin films, and bulk silicon etching techniques. The completed sensors were then characterized to determine electrical, mechanical and piezoelectric properties at the material and device level. Results demonstrate functional operation with performance close to predicted specifications.