DocumentCode
1936711
Title
Electron energy spectrum in a low pressure hollow anode discharge
Author
Popovic, S.S. ; Kunhardt, Erich E.
Author_Institution
Weber Res. Inst., Polytech. Univ., Farmingdale, NY, USA
fYear
1993
fDate
7-9 June 1993
Firstpage
162
Abstract
Summary form only given. The electron energy distribution function (EEDF) in the far field of a low-pressure hollow anode discharge was measured. The hollow anode discharge was generated between a conical hollow anode and a spherical cathode placed at the anode axis. The EEDF was obtained from the analysis of the current collected through the retarding potential of a cylindrical electrostatic probe coaxial with the magnetic field. The transformation of the EEDF from unmagnetized to magnetized conditions was observed as the transition from a bimaxwellian ´continuum´ to a spectrum of beam-like secondary electrons, mostly at low energies, superimposed on the Maxwell distribution of the primary electrons. These low energy electrons constitute a substantial part of the total electron density, and the exact ratio depends on the discharge conditions.
Keywords
glow discharges; Maxwell distribution; electron density; electron energy distribution function; hollow anode discharge; low pressure; primary electrons; secondary electrons; Anodes; Cathodes; Distribution functions; Electron beams; Electrostatic analysis; Electrostatic measurements; Energy measurement; Magnetic analysis; Magnetic field measurement; Probes;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1993. IEEE Conference Record - Abstracts., 1993 IEEE International Conference on
Conference_Location
Vancouver, BC, Canada
ISSN
0730-9244
Print_ISBN
0-7803-1360-7
Type
conf
DOI
10.1109/PLASMA.1993.593460
Filename
593460
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