DocumentCode
1936725
Title
A Monolithic Integrated Active Thin Film Head for Magnetic Recording-An Example for a Combination Technology Suitable for Smart Sensors
Author
Rudolph, H. ; Vernie, K. ; Seitzer, D.
Author_Institution
Lehrstuhl fÿr Technische Elektronik, Universitÿt Erlangen - Nÿrnberg, CauerstraÃ\x9fe 9, 8520 Erlangen, FRG
fYear
1989
fDate
11-14 Sept. 1989
Firstpage
597
Lastpage
600
Keywords
Intelligent sensors; Magnetic films; Magnetic heads; Magnetic recording; Magnetic sensors; Protection; Semiconductor thin films; Sputtering; Temperature sensors; Thin film sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location
Berlin, Germany
Print_ISBN
0387510001
Type
conf
Filename
5436533
Link To Document