• DocumentCode
    1936725
  • Title

    A Monolithic Integrated Active Thin Film Head for Magnetic Recording-An Example for a Combination Technology Suitable for Smart Sensors

  • Author

    Rudolph, H. ; Vernie, K. ; Seitzer, D.

  • Author_Institution
    Lehrstuhl fÿr Technische Elektronik, Universitÿt Erlangen - Nÿrnberg, CauerstraÃ\x9fe 9, 8520 Erlangen, FRG
  • fYear
    1989
  • fDate
    11-14 Sept. 1989
  • Firstpage
    597
  • Lastpage
    600
  • Keywords
    Intelligent sensors; Magnetic films; Magnetic heads; Magnetic recording; Magnetic sensors; Protection; Semiconductor thin films; Sputtering; Temperature sensors; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
  • Conference_Location
    Berlin, Germany
  • Print_ISBN
    0387510001
  • Type

    conf

  • Filename
    5436533