Simulation of trench filling process

Investigation of deep gaps filling during deposition processes were carried out using Monte Carlo simulation. Critical deposition conditions separating complete and incomplete gap filling and dependence of critical deposition conditions on geometrical size of trench were obtained. The quality of gap fill was demonstrated to be dependent not only on deposition conditions but on the chemical nature of adsorbate as well. For nanotrench of definite size there is critical binding energy adsorbate-adsorbate for the given deposition parameters providing high-quality filling.