• DocumentCode
    1941334
  • Title

    Session 3: MEMS

  • Author

    Mita, Yoshio ; Yeric, Greg M.

  • Author_Institution
    University of Tokyo, Japan
  • fYear
    2012
  • fDate
    19-22 March 2012
  • Firstpage
    43
  • Lastpage
    44
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1071-9032
  • Print_ISBN
    978-1-4673-1027-7
  • Type

    conf

  • DOI
    10.1109/ICMTS.2012.6190610
  • Filename
    6190610
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1941334