Spectral interferometric technique for 3D-shape measurement of microscopic objects with improved resolution, speed of measurement and signal processing

Author

Mehta, D.S. ; Sugai, M. ; Hinosugi, H. ; Saito, S. ; Takeda, M. ; Kurokawa, T. ; Takahashi, H. ; Ando, M. ; Shishido, M. ; Yoshizawa, T.

Author_Institution

Univ. of Electro-Commun., Tokyo, Japan

Volume

1

fYear

2001

fDate

15-19 July 2001

Abstract

A spectral interference microscope using a superluminescent diode as light source and a liquid-crystal Fabry-Perot etalon as a frequency tunable device is developed for three-dimensional imaging micro-profilometry. By changing the current to the superluminescent diode, constant light input to the interferometer was achieved throughout the measurement. A high speed Fourier transform technique was developed for analysis of the data. It takes few seconds to measure the three-dimensional absolute height distribution of a discontinuous object. Experimental results with improved resolution and speed of measurement are presented.

Keywords

Fabry-Perot interferometers; Fourier transform optics; height measurement; liquid crystal devices; optical information processing; optical microscopes; shape measurement; superluminescent diodes; 3D-shape measurement; discontinuous object; frequency tunable device; high speed Fourier transform technique; liquid-crystal Fabry-Perot etalon; measurement speed; microscopic objects; resolution; signal processing; spectral interference microscope; spectral interferometric technique; superluminescent diode; three-dimensional absolute height distribution; three-dimensional imaging microprofilometry; Current measurement; Fabry-Perot; Fourier transforms; Frequency; Interference; Light sources; Liquid crystal devices; Microscopy; Optical interferometry; Superluminescent diodes;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-6738-3

Type

conf

DOI

10.1109/CLEOPR.2001.967929

Filename

967929