Incorporation of Deuterium into the Buried Oxide of Simox Structures

Author

Revesz, A.G. ; Myers, S.M. ; Brown, G.A. ; Hughes, H.L.

Author_Institution

Texas Instruments, Inc., Dallas, TX

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

Lastpage

Keywords

Annealing; Argon; Deuterium; Glass; Instruments; Laboratories; Nuclear measurements; Silicon compounds; Sputtering; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

DOI

10.1109/SOI.1992.664784

Filename

664784

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