Profile measurement of high aspect ratio micro structures using a tungsten carbide micro cantilever coated with PZT thin films

Author

Yamamoto, Masaki ; Kanno, Isaku ; Aoki, Shinichiro

Author_Institution

Opto-Electo Mech. Res. Lab., Matsushita Res. Inst. Tokyo Inc., Kawasaki, Japan

fYear

2000

fDate

23-27 Jan 2000

Firstpage

217

Lastpage

222

Abstract

A new profile measurement probe for non-destructive evaluation of high aspect ratio micro structure (HARMS) is proposed. The probe is made of tungsten carbide super hard alloy (WC) and machined by micro EDM. PZT thin films are coated on the probe as an integrated strain sensor. Dedicated measurement machine equipped with this probe is developed and we observed micro holes and gears. In these observations, we obtained very clear images of the sample´s detailed shapes, which demonstrate the system´s validation for HARMS evaluation

Keywords

electrical discharge machining; microsensors; nondestructive testing; piezoelectric thin films; spatial variables measurement; strain sensors; tungsten compounds; HARMS evaluation; HARMS measurement; PZT; PZT thin films; PbZrO3TiO3; WC; WC micro cantilever; WC super hard alloy; gears; high aspect ratio micro structures; integrated strain sensor; micro EDM; micro holes; profile measurement probe; Atomic force microscopy; Capacitive sensors; Coordinate measuring machines; Gears; Mechanical variables measurement; Optical wavelength conversion; Probes; Rough surfaces; Surface roughness; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838519

Filename

838519