DocumentCode
1947668
Title
Trident-type tuning fork silicon gyroscope by the phase difference detection
Author
Abe, Munemitsu ; Shinohara, Eiji ; Hasegawa, Kazuo ; Murata, Shinji ; Esashi, Masayoshi
Author_Institution
Alps Electr. Co. Ltd., Tokyo, Japan
fYear
2000
fDate
23-27 Jan 2000
Firstpage
508
Lastpage
513
Abstract
The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has a Q value higher than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. The gyroscope sensitivity obtained was 180 μV/deg/sec
Keywords
Q-factor; differential detection; elemental semiconductors; gyroscopes; microsensors; semiconductor device packaging; sensitivity; silicon; tuning; vibrations; Si; angular rate; gyroscope sensitivity; phase difference detection; trident-type tuning fork; tuning fork Si gyroscope; vacuum packaging; Arm; Electrodes; Equations; Gas detectors; Glass; Gyroscopes; Packaging; Phase detection; Silicon; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on
Conference_Location
Miyazaki
ISSN
1084-6999
Print_ISBN
0-7803-5273-4
Type
conf
DOI
10.1109/MEMSYS.2000.838569
Filename
838569
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