A fast, robust and simple 2-D micro-optical scanner based on contactless magnetostrictive actuation

Author

Garnier, Amalia ; Bourouina, Tarik ; Fujita, Hiroyuki ; Orsier, Elisabeth ; Masuzawa, Takahisa ; Hiramoto, Toshiro ; Peuzin, Jean-Claude

Author_Institution

Tokyo Univ., Japan

fYear

2000

fDate

23-27 Jan 2000

Firstpage

715

Lastpage

720

Abstract

We have fabricated and successfully operated a new 2D micro-optical scanner based on contactless magnetostrictive (MS) actuation using only one coil. A Si cantilever coated with a sputter-deposited MS film is vibrated simultaneously in both bending and torsion modes at high frequencies (10-50 kHz). It exhibits the maximum optical deflection of ±12 degrees at an excitation field of 4 mT; this is only 2% of the saturation field of the MS material. Moreover, the contactless magnetic actuation enabled an easy wireless vacuum encapsulation that gave Q-factors up to 1400 and improved the vibration amplitude four times more than that in air

Keywords

bending; electromagnetic actuators; encapsulation; etching; magnetostrictive devices; micro-optics; microactuators; micromachining; micromechanical resonators; optical scanners; silicon; torsion; 10 to 50 kHz; 2D micro-optical scanner; 4 mT; Q-factors; Si; TbDyCoFe; Terfenol-D; bending mode; coated cantilever; contactless magnetic actuation; contactless magnetostrictive actuation; double-side silicon etching; fast robust scanner; high frequencies; improved vibration amplitude; magnetoelastic bimorph resonator; maximum optical deflection; single coil; sputter deposited magnetostrictive film; torsion mode; vacuum packaging; wireless vacuum encapsulation; Coils; Frequency; Magnetic films; Magnetic materials; Magnetostriction; Optical films; Optical saturation; Robustness; Saturation magnetization; Semiconductor films;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on

Conference_Location

Miyazaki

ISSN

1084-6999

Print_ISBN

0-7803-5273-4

Type

conf

DOI

10.1109/MEMSYS.2000.838606

Filename

838606