DocumentCode

1949134

Title

Vlsi Soi Fabrication by Simox Wafer Bonding(swb)

Author

Tong, O.-Y. ; Gösele, U.

Author_Institution

School of Engineering, Duke University, Durham, NC

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

72

Lastpage

73

Keywords

Annealing; CMOS technology; Etching; Fabrication; Implants; Semiconductor films; Surface morphology; Temperature; Very large scale integration; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664800

Filename

664800