Electron temperature axial pattern in the RF discharge

Author

Lisovskiy, V.A. ; Boichuk, V.S. ; Yegorenkov, V.D.

Author_Institution

Kharkov State Univ., Ukraine

fYear

1997

fDate

19-22 May 1997

Firstpage

339

Abstract

Summary form only given. This report presents the axial profiles of the electron temperature in the RF discharge in argon and air measured by a single probe technique. The pressure range under study was p=0.1-2 Torr, RF field frequency f=13.56 MHz, interelectrode spacing was L=22 mm. The applied RF voltage amplitudes were: 50, 200, 225, 250 and 350 V. The maxima of T/sub e/ are observed under intermediate pressures near the electrode sheath boundaries in the broad range of RF voltages. This increase is probably due to the stochastic heating of electrons colliding with oscillating boundaries of electrode sheaths. The phenomenon being known at low pressures (p/spl les/0.1 Torr).

Keywords

air; argon; high-frequency discharges; plasma collision processes; plasma sheaths; plasma temperature; 0.1 to 2 torr; 13.56 MHz; 22 mm; 50 to 350 V; Ar-air discharge; RF discharge; axial profiles; electrode sheath boundaries; electron temperature; single probe technique; stochastic heating; Argon; Electrodes; Electrons; Heating; Probes; Radio frequency; Stochastic processes; Temperature; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on

Conference_Location

San Diego, CA, USA

ISSN

0730-9244

Print_ISBN

0-7803-3990-8

Type

conf

DOI

10.1109/PLASMA.1997.605269

Filename

605269