Microelectronic manufacturing of a microsensor based on polyaniline for ammonia gas sensing

Author

Ghita, Mihaela ; Gheorghe, Marian ; Visinoiu, Alina

Author_Institution

Multidisciplinary Dept., Nat. Inst. for R&D in Microtechnol., Bucharest, Romania

Volume

2

fYear

2000

fDate

2000

Firstpage

619

Abstract

The fabrication and operation of an ammonia chemoresistor is described. The sensor responds to changes in the resistance (impedance) of a thin layer of conductive polymer is due to changes in ammonia concentration. The polyaniline film was deposited by electroless plating (dipping) method on interdigitated array made by photolithographic technique. The PANI film was characterized by UV/VIS and IR Spectroscopy and respectively, Atomic Force Microscopy. Impedance Spectroscopy was used for sensor characterization

Keywords

ammonia; conducting polymers; gas sensors; microsensors; polymer films; IR spectroscopy; NH₃; UV/VIS spectroscopy; ammonia gas sensor; atomic force microscopy; chemoresistor; conductive polymer; dipping method; electroless plating; impedance spectroscopy; interdigitated array; microelectronic manufacturing; microsensor; photolithography; polyaniline film; Atomic force microscopy; Fabrication; Impedance; Infrared spectra; Manufacturing; Microelectronics; Microsensors; Polymers; Sensor phenomena and characterization; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics, 2000. Proceedings. 2000 22nd International Conference on

Conference_Location

Nis

Print_ISBN

0-7803-5235-1

Type

conf

DOI

10.1109/ICMEL.2000.838767

Filename

838767