PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling

Author

Casset, F. ; Cueff, M. ; Suhm, A. ; Rhun, G. Le ; Abergel, J. ; Allain, M. ; Dieppedale, C. ; Ricart, T. ; Fanget, S. ; Renaux, P. ; Faralli, D. ; Ancey, P. ; Devos, A. ; Defay, E.

Author_Institution

LETI, CEA, Grenoble, France

fYear

2012

fDate

16-18 April 2012

Firstpage

42373

Lastpage

42464

Abstract

In this paper, we showed the realization and the characterization of a PZT-actuated micro-cantilever. The measurement and the modeling of its resonant frequency allow deducing the cantilever length. Using this value and combining the measurement and the modeling of the cantilever displacement amplitude at a given voltage, we extract PZT d₃₁ piezoelectric coefficient as being 165±25 pm/V; which is among the highest values ever published for PZT thin films. It is worth noting that d₃₁ is homogenous throughout the whole 200mm wafer.

Keywords

cantilevers; circuit resonance; micromechanical devices; piezoelectric actuators; piezoelectric thin films; PZT piezoelectric coefficient extraction; PZT thin film; PZT-actuated microbeam characterization; PZT-actuated microcantilever; cantilever displacement amplitude; cantilever length; resonant frequency measurement; resonant frequency modeling; size 200 mm; Analytical models; Artificial intelligence; Finite element methods; Integrated optics; Micromechanical devices; Optical sensors; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on

Conference_Location

Cascais

Print_ISBN

978-1-4673-1512-8

Type

conf

DOI

10.1109/ESimE.2012.6191704

Filename

6191704