Electromechanical performance comparison for different CMUT element geometries

Different capacitive micromachined ultrasonic transducers (CMUTs) element geometries and fabrication techniques have been proposed through the years though the questions of which element geometry suits each application best as well as further geometrical, array and design parameter optimization techniques still remain open. This paper proposes a thorough comparison between square, hexagonal and circular CMUT elements and geometries through finite element method (FEM) simulations and provides results comparing their respective electromechanical parameters.