Geometrical analysis of a MEMS microphone

Author

Rivadeneyra, Almudena ; Martinez-Marti, F. ; Palma, Alberto J. ; Banqueri, Jesús ; Bernardo, Raúl Muñoz

Author_Institution

Dipt. Electron. y Tecnol. de Comput., Univ. of Granada, Granada, Spain

fYear

2012

fDate

19-21 Sept. 2012

Firstpage

169

Lastpage

172

Abstract

This document presents a study of variations in a MEMS microphone geometry in order to find the best compromise between its capacitance response and its size. It has been shown that COMSOL can achieve accurate results when compared to theoretical models. This is an excellent advantage due to the results of the simulation can provide not only verification concerning the validity of the physical assumptions made in defining the model but also simulations can be used to help determine the design parameters that will optimize the device performance thus minimizing the time, effort, and expense required to construct and test an actual device.

Keywords

electronic engineering computing; geometry; micromechanical devices; microphones; COMSOL; MEMS microphone; capacitance response; design parameters; geometrical analysis; theoretical model; Analytical models; Capacitance; Frequency response; Geometry; Integrated circuit modeling; Micromechanical devices; Microphones; MEMS sensor; PolyMUMPs process; capacitive microphone; mushroom shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2012 International Conference on

Conference_Location

Seville

Print_ISBN

978-1-4673-0685-0

Type

conf

DOI

10.1109/SMACD.2012.6339444

Filename

6339444