DocumentCode

1952628

Title

Silicon on Diamond (sod) Mosfets

Author

Karulkar, Pramod C. ; Annamalai, N.K.

Author_Institution

MIT Lincoln Laboratory, Lexington, MA

fYear

1992

fDate

6-8 Oct. 1992

Firstpage

108

Lastpage

109

Keywords

Conducting materials; Dielectric materials; Fabrication; Laboratories; MOSFETs; Semiconductor films; Semiconductor materials; Silicon; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 1992. IEEE International

Conference_Location

Ponte Vedra Beach, FL

ISSN

1078-621X

Print_ISBN

0-7803-7439-8

Type

conf

DOI

10.1109/SOI.1992.664818

Filename

664818