DocumentCode
1952876
Title
Simulation of thin film field emitter array cathodes
Author
True, R.
Author_Institution
Div. of Electron Devices, Litton Syst. Inc., San Carlos, CA, USA
fYear
1992
fDate
13-16 Dec. 1992
Firstpage
379
Lastpage
382
Abstract
In typical field emitter arrays, individual gates have micrometer dimensions, whereas emitter tip radii are generally two orders of magnitude smaller. Because of this large size differential, it is necessary to use nonuniform meshes to accurately model such devices in a single computer run. This paper describes additions to the deformable triangular mesh finite element based beam optics code of the author, DEMEOS, which enable convenient simulation of field emitter array cathodes.<>
Keywords
cathodes; digital simulation; electron field emission; electronic engineering computing; mesh generation; modelling; thick film devices; vacuum microelectronics; DEMEOS; FEM; deformable triangular mesh; emission model; field emitter array cathodes; finite element based beam optics code; nonuniform meshes; simulation; thin film cathodes; Cathodes; Electron emission; Mesh generation; Modeling; Simulation; Thick film devices; Vacuum microelectronics;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1992. IEDM '92. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Print_ISBN
0-7803-0817-4
Type
conf
DOI
10.1109/IEDM.1992.307382
Filename
307382
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