Modeling and fabrication of Pt micro-heaters built on alumina Substrate

This paper presents design, simulation, fabrication and experimental characterization of the platinum micro-heater elements built on alumina substrate. Micro-heaters are designed for application where the device has to be heated up to 700 °C in less than a 200 ms. Choosing the proper combination of electrical, thermal and mechanical characteristics of thick film heating resistor, glass layer and substrate, as well as geometrical parameters of heating element is crucial for proper heat transfer and performance of the device. These parameters have been taken into account during predetermination of the micro-heaters behavior by means of finite element analyses (FEA) using COMSOL 4.2. Preliminary experimental tests have been conducted in stationary regime using InfraTec ImageIR 8300 thermography system. Simulation and experimental results are compared in order to prove capability of FEA for the design process.