Design and simulation of 4-bit 10-14GHz RF MEMS tunable filter

Author

Zou, Xudong ; Chen, Kenle ; Zhang, Hualiang ; Zhang, Jinwen

Author_Institution

Nat. Key Lab. of Nano/Micro Fabrication Technol. Inst. of Microelectron., Peking Univ., Beijing

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

21

Lastpage

24

Abstract

This paper presents a 4-bit RF microelectromechanical system (MEMS) wide-band tunable filter at the 10-14 GHz frequency range. Open-ended shunt stubs are utilized to load RF MEMS capacitive switches and MAM capacitors acting as the tunable cells, and leads to lower loss and more flexibility of design. The simulation results obtained by 3D electromagnetic simulation tool show that the tuning range is about 30% (from 10.5 GHz to 13.5 GHz) and the insertion loss is from -4.8 dB to -5.2 dB.

Keywords

capacitors; circuit tuning; coplanar waveguide components; microswitches; microwave filters; resonator filters; waveguide filters; 3D simulation; MAM capacitors; RF MEMS capacitive switches; RF MEMS filter; coplanar-waveguide resonators; frequency 10 GHz to 14 GHz; insertion loss; loss -4.8 dB to -5.2 dB; metal-air-metal capacitors; microelectromechanical system; open-ended shunt stubs; three-dimensional electromagnetic simulation; two-pole loaded resonator tunable filter; wideband tunable filter; Radiofrequency microelectromechanical systems; MAM capacitor; Open-ended Shunt Stub; RF MEMS; Tunable Filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068518

Filename

5068518