Characterization of Si3N4/SiC Microstructure Derived from UV curable polymer ceramic precursor pyrolyzing

Author

Ya-Zhou, Wang ; Li-Xin, Chen ; Jia-Le, Song

Author_Institution

Dept. of Appl. Chem., Northwestern Polytech. Univ., Xi´´an

fYear

2009

fDate

5-8 Jan. 2009

Firstpage

185

Lastpage

189

Abstract

The microstructure of Si₃N₄/SiC derived from the pyrolysis of UV curable polymer ceramic precursor was analyzed and characterized by TGA-DTA, XRD, FE-SEM, Electron Spectrometer, and TEM. It was found that two distinct weight loss rate peaks at 358degC and 450degC in TGA curve were identical with two DTA endothermic peaks. The total weight loss was 45wt%. The degree of crystallinity reached 91.25% after annealing at 1600degC for 2h with the composition of SiO₂: Si₃N₄: SiC = 3:26:71 in pyrolysate. Not only did the degree of crystallinity increase, but also the change from alpha-Si₃N₄ to beta -Si₃N₄ took place with the increase of holding time. Irregular whisker of Si₃N₄ was explored by SEM after pyrolyzing at 1400 degC for 24 h.

Keywords

X-ray diffraction; crystal microstructure; curing; differential thermal analysis; polymers; pyrolysis; scanning electron microscopy; silicon compounds; transmission electron microscopy; FE-SEM; Si₃N₄-SiC; Si₃N₄/SiC microstructure; TEM; TGA-DTA; UV curing; XRD; crystallinity; electron spectrometer; polymer ceramic precursor; pyrolysate; pyrolysis; temperature 1400 degC; temperature 1600 degC; temperature 358 degC; temperature 450 degC; time 2 h; time 24 h; weight loss rate; Annealing; Ceramics; Crystallization; Micromechanical devices; Microstructure; Polymers; Silicon carbide; Spectroscopy; Temperature; X-ray scattering; Characterization; Precursor; Pyroylate; UV-curing;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on

Conference_Location

Shenzhen

Print_ISBN

978-1-4244-4629-2

Electronic_ISBN

978-1-4244-4630-8

Type

conf

DOI

10.1109/NEMS.2009.5068555

Filename

5068555