• DocumentCode
    1956360
  • Title

    EWOD using P(VDF-TrFE)

  • Author

    Zhao, Pingan ; Li, Yinqing ; Zeng, Xiangyu ; Zhou, Jia ; Huang, Yiping ; Liu, Ran

  • Author_Institution
    Dept. of Microelectron., Fudan Univ., Shanghai
  • fYear
    2009
  • fDate
    5-8 Jan. 2009
  • Firstpage
    202
  • Lastpage
    205
  • Abstract
    A novel electrowetting on dielectric (EWOD) digital microfluidic device using the high dielectric constant material P(VDF-TrFE) (poly-vinylidene fluoride-trifluoroethylene) as the dielectric layer fabricated by spin-coating process is proposed. The device is featured with the advantages of both IC compatible process and low driving voltage. The contact angle between the liquid droplet and surface of the device changes from 118deg to 75deg under an applied voltage of 30 V. The voltage-polarity-related electrowetting on dielectric phenomenon is observed and applied in our study. A novel single-side coplanar electrodes EWOD device is developed. EWOD at positive and negative voltage is so different that a droplet 3 muL is successfully transported reciprocally under 20 V based on the polarity change of driving voltage.
  • Keywords
    contact angle; dielectric thin films; electrodes; microfabrication; microfluidics; polymers; spin coating; wetting; EWOD; contact angle; dielectric layer fabrication; digital microfluidic device; driving voltage polarity change; electrowetting-on-dielectric; poly-vinylidene fluoride-trifluoroethylene; single-side coplanar electrode; spin-coating process; voltage 20 V; voltage 30 V; voltage-polarity-related electrowetting; Current density; Electrochemical processes; Electrodes; Food preservation; Nanowires; Nitrogen; Polymers; Protection; Systems engineering and theory; Temperature; EWOD; P(VDF-TrFE); digital microfluidics; voltage-polarity-related;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
  • Conference_Location
    Shenzhen
  • Print_ISBN
    978-1-4244-4629-2
  • Electronic_ISBN
    978-1-4244-4630-8
  • Type

    conf

  • DOI
    10.1109/NEMS.2009.5068559
  • Filename
    5068559