Multi-sensor wireless interrogation of SAW resonators at high temperatures

Author

Canabal, A. ; Davulis, P.M. ; Pollard, T. ; Cunha, M. Pereira da

Author_Institution

Lab. for Surface Sci. & Technol. (LASST), Univ. of Maine, Orono, ME, USA

fYear

2010

fDate

11-14 Oct. 2010

Firstpage

265

Lastpage

268

Abstract

This paper presents for the first time, to the best of the authors´ knowledge, successful wireless interrogation of a suite of harsh environment SAW temperature sensors and respective antennas operating at temperatures in excess of 900°C. The suite of langasite (LGS) SAW sensors, utilizing high-temperature Pt/Rh/ZrO₂ thin-film electrodes, with the respective integrated antennas and the interrogator antenna were designed, fabricated, and verified to operate together in the same harsh environment conditions. The set of resonator based SAW sensors were simultaneously interrogated wirelessly in the frequency domain by a single transceiver. Multiple sensor temperature data has been obtained from the different sensors used.

Keywords

antennas; electrodes; high-temperature electronics; sensor fusion; surface acoustic wave resonators; surface acoustic wave sensors; temperature sensors; thin film sensors; wireless sensor networks; LGS SAW sensor; SAW resonator; harsh environment SAW temperature sensor; high-temperature thin film electrode; interrogator antenna; langasite SAW sensor; multisensor wireless interrogation; Antennas; Sensor systems; Surface acoustic waves; Temperature measurement; Temperature sensors; Wireless sensor networks; Harsh Environment SAW; High Temperature; LGS; Resonator Sensors; SAW Devices for Wireless Applications;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2010 IEEE

Conference_Location

San Diego, CA

ISSN

1948-5719

Print_ISBN

978-1-4577-0382-9

Type

conf

DOI

10.1109/ULTSYM.2010.5935789

Filename

5935789