• DocumentCode
    1962252
  • Title

    Two-wavelength Grating Interferometry for Extended Range MEMS Metrology

  • Author

    Toy, M.F. ; Ferhanoglu, O. ; Urey, H.

  • Author_Institution
    Koc Univ., Istanbul
  • fYear
    2007
  • fDate
    Aug. 12 2007-July 16 2007
  • Firstpage
    95
  • Lastpage
    96
  • Abstract
    Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105 nm to 1.7 um assuming sensitivity is maintained at >50% of the maximum sensitivity.
  • Keywords
    diffraction gratings; displacement measurement; light interferometry; micro-optomechanical devices; microsensors; optical sensors; MEMS metrology; diffraction gratings; optical sensors; shot noise limited sub-nm displacement detection; two-wavelength grating interferometry; two-wavelength readout method; wavelength 105 nm to 1700 nm; Diffraction gratings; Frequency measurement; Gunshot detection systems; Metrology; Micromechanical devices; Optical arrays; Optical interferometry; Optical sensors; Sensor arrays; Spectroscopy; Grating interferometry; MEMS metrology; Optical Sensing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
  • Conference_Location
    Hualien
  • Print_ISBN
    978-1-4244-0641-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2007.4373857
  • Filename
    4373857
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1962252