The Pyrolysis of Precursors for Gaas Mocvd Studied by In-situ and Ex-situ Fourier Transform Infared Spectroscopy

Author

Armstrong, S.R. ; Hoare, R.D. ; Pemble, M.E. ; Povey, I.M. ; Stafford, A. ; Taylor, A.G. ; Williams, J.O.

Author_Institution

Department of Chemistry and Centre for Electronic Materials, UMIST, UK

fYear

1992

fDate

8-11 Jun 1992

Firstpage

Lastpage

Keywords

Chemistry; Fourier transforms; Gallium arsenide; Inductors; Laboratories; MOCVD; Probes; Sampling methods; Spectroscopy; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference

Print_ISBN

0-87942-652-7

Type

DOI

10.1109/MOVPE.1992.664918

Filename

664918

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