Characteristics of indium-tin-oxide thin films deposited by e-beam evaporator at high-temperature

Author

Ahn, Su-Chang ; Hyun-Jun Kim ; Park, Yeon-Chan ; Kim, Hyun-Jun ; Lee, Jin-Hong

Author_Institution

Korea Photonics Technol. Inst., Gwangju, South Korea

fYear

2010

fDate

8-12 Dec. 2010

Firstpage

341

Lastpage

342

Abstract

Transparent electrically conducting thin films are particularly attractive and are receiving increased interest in applications such as liquid crystal displays, transparent electrodes for solar cells, and light-emitting diodes(LED). In particular, Indium tin oxide (ITO) films have been studied in view of the practical performance of their electrical and optical properties to meet the increasing requirements of advanced technologies. However, most of blue LED ITO film for transmittance electrodes was being researched expensive sputtering method.

Keywords

electrical conductivity; electrodes; electron beam deposition; indium compounds; light emitting diodes; liquid crystal displays; solar cells; thin films; tin compounds; vacuum deposition; ITO; LED; e-beam evaporation; electrical properties; electrically conducting thin films; indium-tin-oxide thin films; light-emitting diodes; liquid crystal displays; solar cells; sputtering method; transparent conducting thin films; transparent electrodes; Electrodes; Indium tin oxide; Light emitting diodes; Optical films; Optical imaging; Scanning electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Communications and Photonics Conference and Exhibition (ACP), 2010 Asia

Conference_Location

Shanghai

Print_ISBN

978-1-4244-7111-9

Type

conf

DOI

10.1109/ACP.2010.5682531

Filename

5682531