• DocumentCode
    1970088
  • Title

    100GHz SiGe:C HBTs using non selective base epitaxy

  • Author

    Martinet, B. ; Baudry, H. ; Kermarrec, O. ; Campidelli, Y. ; Laurens, M. ; Marty, M. ; Schwartzmann, T. ; Monroy, A. ; Bensahel, D. ; Chantre, A.

  • Author_Institution
    STMicroelectronics, Crolles, France
  • fYear
    2001
  • fDate
    11-13 September 2001
  • Firstpage
    97
  • Lastpage
    100
  • Keywords
    Doping; Epitaxial growth; Fabrication; Frequency; Germanium silicon alloys; Heterojunction bipolar transistors; Implants; Silicon carbide; Silicon germanium; Wireless communication;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2001. Proceeding of the 31st European
  • Print_ISBN
    2-914601-01-8
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2001.195210
  • Filename
    1506592
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1970088