• DocumentCode
    1971054
  • Title

    MOEMS gyroscope based on acoustooptic mode coupling

  • Author

    Lu, Shu-xiang ; Chen, Shu-fen ; Zhao, Yi

  • Author_Institution
    Dept. of Opto-Electron. Eng., Beijing Inst. of Technol., Beijing, China
  • fYear
    2010
  • fDate
    8-12 Dec. 2010
  • Firstpage
    292
  • Lastpage
    293
  • Abstract
    A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg-1s-1 in the angular rate range of 0 -400deg/s.
  • Keywords
    acousto-optical devices; electro-optical modulation; gyroscopes; micro-optomechanical devices; optical waveguide components; surface acoustic wave sensors; LiNbO3; MOEMS gyroscope; acoustooptic mode coupling; electro-optical modulator; optical waveguide diffractive component; surface acoustic wave sensor; Gyroscopes; Optical reflection; Optical sensors; Optical surface waves; Optical waveguides; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Communications and Photonics Conference and Exhibition (ACP), 2010 Asia
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-7111-9
  • Type

    conf

  • DOI
    10.1109/ACP.2010.5682718
  • Filename
    5682718
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1971054